Yun Chuan Hsieh

-NAND Flash (24nm)-  BEOL Bit-line (BL) shrink from 32nm -> 28nm development for next generation product 1. Process margin check & tuning for New tape out (NTO) 2. New process development for wafer level reliability (WLR) improve -> Cu BL barrier thickness tuning for better EM/SM -> Cu BL cap SiN thickness tuning for better TDDB 3. Design maunal modify for new design 4. Build cross-fuctional team discussion to solve the issue  Pad Al THK from 8000A -> 14000A development for customer required 1. BKM foundary other product experience 2. Design maunal modify for min space rule & line-end rule 3. Lithography study from KrF -> I-line for sufficient PR THK  Mask Tape out experience 1. New mask drawing & tape out for BL contact N/P implant seperate  Yield Enhancement 1. New process development for BEOL ILD bump issue, DC yield enhanced ~5%

**Flash memory (24nm)** • Benchmark foundry BKM (Best-known method) for customer cost down --> Bonding pad Al thickness increasing to 800nm for customer could use Cu ball instead of Au ball to package • Develop & Research SADP (Self-Alignment Double Pattering) process for next generation product --> Al THK 800nm electromigration qulification (EM) pass --> NAND flash BEOL Cu bit-line (BL) CD shrink from 32 to 28 nm • BEOL process tuning --> New mask insert original process flow induced polymer remain, modeling and co-work with module tuning process condition to remove polymer remain • Build cross-functional team discussion to solve issues • Supporting customers new tape out (NTO) for 24nm platform product • Process margin check and spec Cp/Cpk review for transferring mass production

Thesis topic: Examining Material Properties using Defect Dynamics and Crystal Dynamics. 1. I established defect dynamics equations based on analysis results from optical (UV-Vis), electrical impedance (LCR Meter), titration (acid-base), and chemical structure (FT-IR) analyses. These equations were used to analyze material aging properties. 2. Utilizing DSC and XRD, I investigated material crystal dynamics and crystalline properties during specific material processing at different temperatures. 3. These analytical methods were applied to polymeric materials, allowing for the analysis of various material properties and their potential applications.

Topic: The Impact of Different Types (LA-132, PAA) and Ratios of Binders on the Electrochemical Performance of Lithium-ion Batteries. 1. Using a 1:1 mixture of two binders, LA-132 and PAA, improved the lifespan of lithium-ion batteries by 25% compared to using either LA-132 or PAA alone. 2. Improved the assembly process of lithium-ion batteries by adjusting the composition, resulting in a 10% increase in battery yield. 3. Acquired skills in the tube furnace process for synthesizing cathode materials for lithium-ion batteries and proficiency in using scanning electron microscopy to observe microstructures.