Yuanfu Yue
Product Engineer @ Lam Research
About
1. Investigated fundamental plasma physics and chemistry in broadband low-temperature plasmas spanning from (pulsed) DC, kHz to RF excitation and plasma-liquid/surface interactions. 2. Extensive experiences in optical diagnostics including OES, (cavity-enhanced) OAS, (Two-photon absorption) laser-induced fluorescence (LIF), laser scattering (Rayleigh, Raman, and Thomson) spectroscopy and vibrational sum frequency generation (SFG) spectroscopy.
United States
Fremont
Semiconductors
Remote Sensing, Plasma Treatment, Plasma Diagnostics, Plasma Physics, Spectroscopy, Plasma Etch
Experience
Product Engineer
Lam Research
Fremont, California, United States
Plasma diagnostics and optical sensor development
Research Assistant
University of Minnesota
1. Productive and destructive mechanisms of plasma-generated reactive species, fluxes quantification and induced liquid chemistry. 2. Transport mechanism of reactive species in bulk plasma and at plasma-surface interface. 3. Plasma thermal instability and plasma induced flow perturbation. 4. Plasma sheath characterization at plasma-liquid interface. 5. Electric field, electron density/temperature, radicals and gas temperature characterization by multiple in-situ spectroscopic diagnostics, ie. optical emission spectroscopy, (cavity-enhanced) optical absorption spectroscopy, (two-photon absorption) laser-induced fluorescence spectroscopy, and laser scattering spectroscopy (Rayleigh, Raman, and Thomson).
Process Engineering Intern
Intel
Rio Rancho, New Mexico, United States
Developing robust algorithm for the endpoint detection in HMO with optical emission spectroscopy (OES).
Research Intern
KAUST (King Abdullah University of Science and Technology)
Building up filtered Rayleigh scattering (FRS) spectroscopy for diagnostics of combustion and plasma-surface interaction.
Education
University of Minnesota
Mechanical Engineering
Huazhong University of Science and Technology
Electrical and Electronics Engineering
Huazhong University of Science and Technology
Electrical and Electronics Engineering
Yuanfu Yue's Contact Information
Phone
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