Xiaolin Cai

Regional Applications Manager for Candela® products in the KLA Instruments Group. (1) Has extensive experience with bare wafer defect inspection for compound semiconductor wafers including SiC, GaN, GaAs, InP, etc. being used for Power, RF, LED, Communications and Sensing markets. (2) Deep understand compound semiconductor defect inspection equipment, market, customer requirements, product development, features characterization, applications development. (3) Build and lead team achieve objectives.

Senior Application Engineer at KLA Instruments Group. (1) 8 years semiconductor inspection applications experience at KLA for worldwide semiconductor customers support. (2) Expert in compound-semi and LED related defect inspection. Experienced in SiC/GaN/GaAs/InP materials defects characterization originated from crystal growth, CMP, and cleaning process. Experienced in MOCVD/MBE/HVPE epitaxy growth defect generation and inspection in material systems, such as SiC/SiC, GaN/Si, GaN/SiC, GaN/Sap etc. (3) Help China compound-semi customers set up defect control strategy to enable stable wafer quality and improve process. (4) Inspection tool CIP, feature development, characterization, beta test. (5) Skilled in defect inspection, review, metrology, design of experiments, project management, presentation.

(1) 2 years in main stream semiconductor wafer inspection applications support. Experienced in nanometer defects characterization, process monitoring, and yield enhancement. Familiar with logic/memory IC manufacturing process flow. (2) Familiar with compound-semi and adjacent defect inspection. Familiar with 3rd generation semiconductor materials (SiC, GaN) crystal growth, defect generation, defect inspection and process control. (3) Demo support for pre-sales customer penetration and technique engagement. Team work with sales, distributors, marketing to demonstrate value to customers. (4) Applications support after tool installation, develop application use cases, customer collaborations, write BKMs.