Tae Hoon Kang

• Defining reticle inspection system specification • Identify the gap between marketing requirements and current performance • Determine improvements to close the gap between marketing requirements • Responsible for system performance, availability, diagnostics, automation, and other system specifications • Investigate dependency between system performance and sub-system parameters

• Provide accurate mathematical models for forecasting product availability, cost of service, labor hour, reliability, and other product specifications • Collaborate with system engineering, customer service, and field office to improve state of availability, cost of service, labor hour, reliability, and other product specifications • Investigate gap between system product specification and forecasted bottom-up values • Determine and track improvement projects needed to close the gap between product specification and forecasted bottom-up values • Maintain and update Availability Matrix (AVM) with accurate frequency, MTTR, labor hour data • Run carousel meetings with cross-sectoral participants from Veldhoven, Netherlands and San Diego, United States to validate accuracy in availability data in AVM. • Generate new ideas and prioritize improvement projects to reach availability target • Chairperson of EUV Source Preventive Maintenance Change Control Board (PM CCB) • Determine, compile, and organize preventive maintenance service actions required to optimize availability for customers • Optimize preventive maintenance schedule for maximizing scheduled down availability Accomplishments: • Improved projected availability values for EXE:5000 Source G1 from 85% to 96% • Reduced number of Extreme Long Down (XLD) events from 3.5 to 2.75 #/machine/year • Designed a new tool to automate the analysis of availability and XLD impact from cross-sectoral multi-disciplined functional clusters • Reduced downtime availability impact from 4% to 2% by optimizing preventive maintenance schedule

• Generated green to green sequences for service actions for ASML customers • Optimized ASML service sequences for minimizing Mean Time To Repair (MTTR) • Optimized sequences to allow for merging of multiple service actions to improve availability • Prepared complete service mix (sequence, procedures, part and tools list, etc.) for all service actions • Provided improvements and feedback for ASML sequence generation tooling • Was the project lead of EUV Source Preventive Maintenance Change Control Board (PM CCB) Accomplishments: • Authored 4 Test Performance Specification (TPS) documents • Authored 4 different Test Analysis Report (TAR) documents • Designed and implemented 6 different Common Access and Recovery Sequences (CARS) • Designed and implemented over 30 different Service Sequences

- Working with piezoelectricity and piezoelectric materials - Aim is to devise an effective flexible energy harvesting device that is durable and self-sufficient - Working with PVDF, Barium Titanate, Lead Zirconate Titanate PZT an various composite materials.

• Operated advanced EUV light source on day-to-day operation • Executed complicated test and aid the design of the test sequences • Troubleshot issues relevant to system and tooling • Cataloged issue and drive the engineering team to find resolution • Trained new engineers in operation and way of working

System Engineer – Product Industrialization - Setup and Recovery • Created system level specs by communicating with customers directly and through marketing team. • Collaborated with subject matter experts to finding a way forward to meeting customer’s specification • Created system performance specification documentation • Communicated with development team to validate feasibility of proposed solution for reaching specification • Planned system level design, development and test requirement and planning • Created sequence of procedures that is part of availability spec • Drove setup and recovery availability improvement for existing and future systems • Defined and develop setup and recovery sequences for existing and future systems • Oversaw the implementation and validation of overall system and sub-system for setup and recovery sequences • Created vision for and roadmap to high volume manufacturing tool for customer • Created an architecture to support and improve existing and future sequences • Analyzed and driving improvements of Setup and Recovery

• Accepted 1 year expatriate assignment to South Korea to provide direct and more efficient support to Korean customers for next generation photolithography machines • Assured high performance and availability of four new machines across two customer sites • Collaborated with the local team to fulfill difficult customer requests • Maintained communication across headquarter in Veldhoven, Netherlands and satellite office in San Diego • Trained local 1st and 2nd line Engineers in working methods and in technical knowledge of new machine. • Supported upgrades and installation of machines and new tools at two Korean customer sites • Provided technical knowledge as the System Expert of 3300 Cymer Source and 3100 Cymer Source.

• Gained in-depth understanding of Cymer EUV Light Sources through hands-on experience • Have long-term UG1 No Master Oscillator (NOMO) Source operation experience and Master Oscillator + Pre Pulse (MOPP) Source operation experience • Have comprehensive understanding of capabilities and limitations on the current EUV Light Sources and the areas they need to be improved on • Identified the tools that are needed and the tools that are available on the 3100 EUV systems as the end user of these tools on customer sites • Worked closely with Samsung and carried out weekly meetings to report the progress of various projects • Led the project to resolve long-standing Y Target drift issue at Samsung working with system engineering and algorithm group • Analyzed customer data to determine system health and to troubleshoot performance issues • Worked together with Machine Fathers and data analysts to develop new metrics to determine correct uptime of the internal machines by SEMI industry standards

• Operated, maintained and upgraded UG0.5 and UG1 NOMO 3100 EUV Source. • Traveled to and worked on all of Cymer 3100 EUV source end-user customer sites and have knowledge of each and every customer fab layout • Performed various maintenance and diagnostic on Light Sources at customer sites.