
ShinHwa Li
Business Development Manager @ Vacuum Engineering & Materials
About
Strategic Thinker, Analytical Mind, Innovative Engineer, and Ethical Person. Catalyst from Technology to Markets, from Prototype to Volume Production. Liaison between America and Asia, Company and Customers. Specialties: Processes: PVD, CMP, EPI, ALD, CVD, ECD, RTP, MOCVD, MBE, etc Materials: Transistor (Si and III-V), Memory (conventional and NVM), Interconnect, 3DIC, etc Applications: IC, Discrete, Optoelectronics, PV, Sensors, RF, MEMS, etc. Publications: 1 book, 56 technical paper/presentations, 13 patent/trade secrets
United States
Chandler
Semiconductors
PVD, CVD, IC, Materials, CMP, EPI, Semiconductors, PV, Thin Films, Information Systems, Semiconductor Industry, Failure Analysis, Metrology, Design of Experiments, Interconnect, SPC, Characterization, Discrete, R&D, Manufacturing
Experience

Application/Product Manager
Absorb semiconductor industry trends and develop products (sputtering targets) using existing internal material and fabrication capabilities. Introduced/marketed new products or existing products to customers. Resolved customer issues technically, business-wise, financially, if any.

Senior Process Support Engineer
Published the first industry CMP book: Chemical Mechanical Polishing in Silicon Processing. Successfully ramped up 120 Mirra tools and resolved process issues at Intel's virtual factory. Coordinated beta-testing of Electro Cu Plating (ECD) at customer site.

Senior Process Development Engineer
Initial key engineer for the Phoenix fab. Benchmarked the specifications and processes for PVD, RTP, CVD, CMP, and many metrology tools. Successfully ramped up the wafer outputs to volume production. Developed the hot Al process for the 350nm technology node. Pioneered WCMP using the W2000 slurry for 250nm technology.

Research Fellow
Ann Arbor, MI
Managed Gas-Phase Molecular Beam Epitaxy, also called Chemical Beam Epitaxy. Epitaxial growth of pseudomorphic Si/SiGe. Fabrication of high speed transistor and nano-devices using state of art integrated circuits processes. Supervision of graduate students.
Education
ShinHwa Li's Contact Information
Phone
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