Shane Lin, PhD

Corporate Managing Director, Head of Engineering, EPI & Preclean @ ASM

About

- Multi-principal degree and academic background in ME, EE, thin film chemistry and physics. - 15+ years of experience in development of complex thermal and RF plasma semiconductor equipment. - Proven record of successful leadership in developing innovative products for Etch/EPI/PreClean/PECVD/ALD/PVD. - Experience leading development programs for complex technical equipment involving multi-discipline engineers and outsource partners, and take actions to provide most elegant solutions. - Ability to multi-task and work effectively in a fast-paced, dynamic environment as part of a multi-disciplinary matrix management structured teams including account, process, productivity, operation, quality, and suppliers. - Excellent leadership, interpersonal and communication skill with strong cultural competence. Specialties: - Materials Engineering: Coating, Cleaning, Characterization like, SEM, TEM, XPS, EDX, ICP-MS, GC-MS, AUGER etc; - Electrical Engineering: DC/AC/RF circuit, RF generator, match box, transmission line, filter; - Mechanical Engineering: Solidworks, UG, G&T; RF Plasma Design, stress/thermal/flow FEA; - Control and Software Engineering: Bechhoff/Omron PLC automation; C/C++, Labview/NI DAQ, Matlab; - Vacuum and Plasma: Gas delivery, pump, valve, MFC, etc.;

Country

United States

City

Greater Phoenix Area

Industry

Semiconductors

Skill

Thermal, RF, RF match box, Plasma Etch, Solidworks, Cosmos FEA, Vacuum Chambers, Motion Control, AutoCAD, EDX, SEM, Semiconductors, Thin Films, RF Generator, ANSYS FEA, UGS NX5, AFM, XPS, Labview, Project Management

Experience

Corporate Managing Director, Head of Engineering, EPI & Preclean

ASM

2022-4 - Present · 4 yrs 6 mos

Phoenix, Arizona, United States

Senior Director, Head of Engineering, EPI & Preclean

ASM

2016-8 - 2022-4 · 5 yrs 9 mos

Phoenix, Arizona, United States

Was Sr Manager and Director. Lead core engineering teams and develop EPI/pre-clean products with their engineering technology enabling advanced semiconductor wafer processing.

Member of Technical Staff, DSM

Applied Materials

2013-6 - 2016-8 · 3 yrs 3 mos

San Francisco Bay Area

- Worked in PECVD to develop hardware and technology enabling disruptive dielectric thin film; - Managed critical components (AlN heater/ ESC, high T showerhead, etc.) development in thermal and RF plasma environments; - Managed various projects related to RF, plasma, thermal and gas delivery; - Developed many technology for APF/Kodiak, high-selectivity carbon PECVD film and ON staircase film

Senior Systems Engineer

Veeco

2011-9 - 2013-5 · 1 yr 9 mos

Greater New York City Area

- Managed projects development in new tools for chemical vapor deposition, ALD and MOCVD. - Managed project development and was lead developer in new low particle EFEM/loadlock/mainframe; - Good experience in project and PLC management. Supervised new tool development from MRS, C&F, tool development to field installation;

Engineer IV, Engineering and Technology Development, Etch Division

Applied Materials

2007-4 - 2011-9 · 4 yrs 6 mos

San Francisco Bay Area

- Worked in Conductor Etch engineering and technology group; - Lead development of low/high temperature etch electrostatic chuck and cathode in RF plasma environment; - Expertise in ESC materials, ESC mechanical and electrical design allowing improved temperature uniformity, highly thermal and RF flexibility, and superior quality; - Developed ESC power supply, and high power filter/match box/generator; - Understood and developed ICP/CCP plasma source/bias; - Understood plasma etch process, silicon gate etch, HKMG, STI, etc. - Very familiar with ceramic manufacturing: firing, grinding, brazing, diffusion bonding, etc. - Lead in chamber critical components particle control, and chamber matching

Research Assistant, Hardware and Process Development

Univerisity of California, Riverside

2002-9 - 2007-4 · 4 yrs 8 mos

Riverside, CA

- Developed UHV (10^-10 Torr)and Low Temp (10K). Scanning Tunneling Microscope; - Developed UHV thermal evaporation system for organically thin film deposition; - Developed automated sputtering and annealing for substrate cleaning; - Investigated the adsoprtion and desorption behavior, diffusion, thin film formation and reactive mechanism;